发明名称 |
Defect inspection of objects such as electronic circuits |
摘要 |
Successive areas of a high-resolution object image are compared with corresponding areas of a low-resolution master pattern to produce signals representing the quality of the object. Comparison is effected by detecting which of a set of features occurs in each area of the object image, detecting which feature of the same set occurs in a larger area of the master pattern, and determining whether these two features are the same.
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申请公布号 |
US4056716(A) |
申请公布日期 |
1977.11.01 |
申请号 |
US19760701337 |
申请日期 |
1976.06.30 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BAXTER, DUANE WILLARD;SHIPWAY, RICHARD EDWARD |
分类号 |
G01N21/88;G01B11/24;G01N21/93;G01N21/956;G01R31/308;G06T1/00;H05B39/08;(IPC1-7):H04N1/38 |
主分类号 |
G01N21/88 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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