| 发明名称 |
PRODUCTION OF SEMICONDUCTOR DEVICE |
| 摘要 |
PURPOSE:To make large-volume treatment within a short time with a small volume of treating solutions by beforehand depositing an oxide protecting film slightly thickly on an ohmic electrode and making possible surface oxidation treatment in that state. |
| 申请公布号 |
JPS52130294(A) |
申请公布日期 |
1977.11.01 |
| 申请号 |
JP19760046108 |
申请日期 |
1976.04.24 |
| 申请人 |
OKI ELECTRIC IND CO LTD |
发明人 |
ANDOU MASAYASU |
| 分类号 |
H01L21/316;H01L33/30;H01L33/36 |
主分类号 |
H01L21/316 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
