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发明名称
PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS52129276(A)
申请公布日期
1977.10.29
申请号
JP19760045968
申请日期
1976.04.21
申请人
FUJITSU LTD
发明人
NAKAI SOUICHIROU;WATARI KIYOTO;OOWASHI TOORU
分类号
C30B31/02;H01L21/22;H01L21/223
主分类号
C30B31/02
代理机构
代理人
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地址
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