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发明名称
PATTERN FORMATION OF SEMICONDUCTOR ELEMENT
摘要
申请公布号
JPS52128065(A)
申请公布日期
1977.10.27
申请号
JP19760045073
申请日期
1976.04.20
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
OGAWA KAZUFUMI
分类号
H01L21/31;H01L21/302;H01L21/316
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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