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经营范围
发明名称
SPATTER ETCHING METHOD
摘要
申请公布号
JPS52127770(A)
申请公布日期
1977.10.26
申请号
JP19760044615
申请日期
1976.04.19
申请人
FUJITSU LTD
发明人
ITOGA MASANAO;ICHIKAWA TOSHIROU
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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