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发明名称
摘要
申请公布号
JPS52140774(U)
申请公布日期
1977.10.25
申请号
JP19760049154U
申请日期
1976.04.19
申请人
发明人
分类号
C23F4/00;H01L21/302;H01L21/306;H01L21/3065;H01L21/465;(IPC1-7):H01L21/306
主分类号
C23F4/00
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