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发明名称
DOPING PROCESS OF NITROGEN TO ALXGALLXAS
摘要
申请公布号
JPS52126166(A)
申请公布日期
1977.10.22
申请号
JP19760041781
申请日期
1976.04.15
申请人
KOGYO GIJUTSUIN
发明人
MAKITA YUUNOSUKE;GONTA SHIYUNICHI
分类号
H01L21/265;H01L21/324
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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