| 发明名称 |
SCANNING TYPE LENGTH MEASURING APPARATUS |
| 摘要 |
PURPOSE:To display subject surface images and measure the length of lengthmeasuring patterns at sufficient accuracy and with ease by two-dimensionally scanning the subject surface having extremely fine length-measuring patterns with a charge particle beam. |
| 申请公布号 |
JPS52123646(A) |
申请公布日期 |
1977.10.18 |
| 申请号 |
JP19760040069 |
申请日期 |
1976.04.09 |
| 申请人 |
NIPPON ELECTRON OPTICS LAB |
发明人 |
MIYAUCHI SAKAE;OOHASHI MASARU |
| 分类号 |
G01D5/50;G01B7/00;G01B7/02;G01B15/00;G01N23/225;G01R31/302;H01L21/66 |
主分类号 |
G01D5/50 |
| 代理机构 |
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代理人 |
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| 地址 |
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