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发明名称
SPECIMEN SCANNING METHOD FOR ION IMPLANTATION
摘要
申请公布号
JPS52123174(A)
申请公布日期
1977.10.17
申请号
JP19760039358
申请日期
1976.04.09
申请人
HITACHI LTD
发明人
SUEHIRO NAOJI
分类号
H01J37/317;H01J37/30;H01L21/265
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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