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经营范围
发明名称
CONTROL DEVICE OF ELECTROLYTIC ETCHING BATH
摘要
申请公布号
SU576624(A1)
申请公布日期
1977.10.15
申请号
SU19762371884
申请日期
1976.06.08
申请人
OKRUZHNOV VIKENTIJ N,SU
发明人
OKRUZHNOV VIKENTIJ N,SU
分类号
H01L21/3063;G01R31/26;H01L21/306;(IPC1-7):H01L21/30
主分类号
H01L21/3063
代理机构
代理人
主权项
地址
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