VERFAHREN ZUM HERSTELLEN VON HALTERUNGEN AUS SILICIUM ODER SILICIUMCARBID FUER DIFFUSIONS- UND TEMPERPROZESSE,申请号DE19732349512-传众专利搜索

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发明名称	VERFAHREN ZUM HERSTELLEN VON HALTERUNGEN AUS SILICIUM ODER SILICIUMCARBID FUER DIFFUSIONS- UND TEMPERPROZESSE
摘要
申请公布号	DE2349512(B2)	申请公布日期	1977.10.13
申请号	DE19732349512	申请日期	1973.10.02
申请人		发明人
分类号	C01B33/02;C01B33/027;C23C16/22;C23C16/44;C23C16/455;C30B31/14;H01L21/22;H01L21/673;(IPC1-7):C23C11/08	主分类号	C01B33/02
代理机构		代理人
主权项
地址

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