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发明名称
SEMICONDUCTOR SUBSTRATE WASHING DEVICE
摘要
申请公布号
JPS52120771(A)
申请公布日期
1977.10.11
申请号
JP19760038063
申请日期
1976.04.05
申请人
NIPPON ELECTRIC CO
发明人
ICHIMURA JIYUNJI;URUSHIHARA YUKIO
分类号
H01L21/304;H01L21/302
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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