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发明名称
THIN FILM FORMATION METHOD
摘要
申请公布号
JPS52120770(A)
申请公布日期
1977.10.11
申请号
JP19760037153
申请日期
1976.04.05
申请人
HITACHI LTD
发明人
HONMA YOSHIO;NOZAWA HARUO;HARADA TADAYOSHI
分类号
H01L21/306;H01L21/302
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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