| 发明名称 |
DISPLACEMENT CONVERTER USING SEMICONDUCTOR STRAIN GAUGES |
| 摘要 |
PURPOSE:To improve the adhesion properties of a strain gauge and a strain inducing body, etc. and accurately detect the amount of displacement by subsequently depositing three layers of Cr, Cu or Ni and Au on the oxide film deposited on one surface of a semiconductor strain gauge.
|
| 申请公布号 |
JPS52119953(A) |
申请公布日期 |
1977.10.07 |
| 申请号 |
JP19760035958 |
申请日期 |
1976.04.02 |
| 申请人 |
HITACHI LTD |
发明人 |
SHIMADA SATOSHI;KURIHARA YASUTOSHI;KAGAMI TERUYUKI;MATSUDA YASUMASA;KOSUGI TETSUO;YAMADA KAZUJI;MATSUSHITA YASUO;SHIMASOE MICHITAKA;NAKAMURA KOUSUKE |
| 分类号 |
G01D5/16;G01B7/16;G12B1/00;H01L21/52;H01L41/00 |
主分类号 |
G01D5/16 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
