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发明名称	MANUFACTURE OF SEMICONDUCTOR
摘要
申请公布号	JPS52119169(A)	申请公布日期	1977.10.06
申请号	JP19760035650	申请日期	1976.03.31
申请人	TOKYO SHIBAURA ELECTRIC CO	发明人	MATSUDA TAKASHI
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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