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发明名称
METHOD OF ETCHING SAPPHIRE UTILIZING SULFUR HEXAFLUORIDE
摘要
申请公布号
US4052251(A)
申请公布日期
1977.10.04
申请号
US19760736882
申请日期
1976.10.29
申请人
RCA CORPORATION
发明人
WEITZEL, CHARLES EDWARD
分类号
C04B41/53;C04B41/91;C09K13/08;C30B33/00;H01L21/205
主分类号
C04B41/53
代理机构
代理人
主权项
地址
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