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发明名称
MICROOETCHING DEVICE
摘要
PURPOSE:To realize etching formation of micro photo mask to be used for LSI, etc. with no use of complicated equipment, by performing drawing of luster mode using light instead of electronic beam.
申请公布号
JPS52117565(A)
申请公布日期
1977.10.03
申请号
JP19760034171
申请日期
1976.03.30
申请人
发明人
分类号
H01L21/30;B23K26/00;H01J37/30;H01J37/305;H01L21/027;H01L21/26;H01L21/48
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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