| 发明名称 |
RESIST IMAGE FORMATION BY STRIPPING |
| 摘要 |
PURPOSE:To enable a light sensitive material for forming a conventional stripping development type resist image to be rendered highly sensitive without impairing various characteristics of the resist layer, by employing in combination an aromatic carbonyl compound and an amine as a photopolymerization initiator. |
| 申请公布号 |
JPS52117133(A) |
申请公布日期 |
1977.10.01 |
| 申请号 |
JP19760033927 |
申请日期 |
1976.03.26 |
| 申请人 |
FUJI PHOTO FILM CO LTD |
发明人 |
KONDOU SHIYUNICHI;MATSUFUJI AKIHIRO;UMEHARA AKIRA;TAKAHASHI YOUNOSUKE |
| 分类号 |
G03F7/004;G03C1/00;G03F7/032;G03F7/28;G03F7/34;H01L21/027;H01L21/30 |
主分类号 |
G03F7/004 |
| 代理机构 |
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代理人 |
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