| 摘要 |
A tapered, generally triangular, rigid housing in which one angle forms a leading edge and the opposite side of the triangle forms a trailing edge. A vacuum attachment nozzle extends into the housing from the trailing edge toward the leading edge. A pliable suction cup is mounted and fixed in said housing by the vacuum nozzle which extends therethrough and is in fluid communication with the interior of a chamber in the suction cup. The exposed portion of the cup comprises a tapered, pliable, generally circular lip which extends slightly beyond one face of the housing. A plurality of wafer-contacting surfaces are located loosely adjacent the periphery of the lip, each spaced 120 DEG from the adjacent suface. A lifting finger may be attached to the leading edge of the housing in order to pick up wafers which are stored on a horizontal surface and move the wafers onto the lip for grasping thereby.
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