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发明名称
METHOD OF POLISHING SUBSTRATE CRYSTAL FOR EPITAXIAL GROWTH
摘要
申请公布号
JPS52115169(A)
申请公布日期
1977.09.27
申请号
JP19760031325
申请日期
1976.03.24
申请人
HITACHI METALS LTD
发明人
ITOU KOUHEI
分类号
H01L21/205;H01L21/20;H01L21/302;H01L21/304
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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