| 发明名称 |
PREPARATION OF SEMICONDUCTOR DEVICE |
| 摘要 |
PURPOSE:To obtain an element having a desired reverse mesa structure by performing vevelling from the side of a temperature-compensating plate smaller than the plane of an element to which a temperature-compensating plate is to be attached. |
| 申请公布号 |
JPS52113178(A) |
申请公布日期 |
1977.09.22 |
| 申请号 |
JP19760029446 |
申请日期 |
1976.03.18 |
| 申请人 |
TOKYO SHIBAURA ELECTRIC CO |
发明人 |
FUJIYAMA MASAHIRO;OGATA AKINORI;MURAMATSU HISANORI |
| 分类号 |
H01L21/329;H01L29/06;H01L29/74 |
主分类号 |
H01L21/329 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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