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发明名称
VERFAHREN ZUM AETZEN VON SILICIUM UNTER ANLEGUNG EINER ELEKTRISCHEN SPANNUNG
摘要
申请公布号
DE2707372(A1)
申请公布日期
1977.09.22
申请号
DE19772707372
申请日期
1977.02.21
申请人
INTERNATIONAL BUSINESS MACHINES CORP.
发明人
LOUIS DEINES,JOHN;ROBERT POPONIAK,MICHAEL;OTTO SCHWENKER,ROBERT
分类号
H01L21/66;G01N27/00;G01R31/26;H01L21/306;(IPC1-7):C25F3/12
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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