发明名称 XXRAY EXPOSING DEVICE
摘要 PURPOSE:To provide a X-ray exposing device in which removal and replacement of a wafer is easy by holding a mask-aligning device in the air and opposite to the window of a lens tube for withdrawing X-rays which is airtightly coupled directly to X-ray box capable of being driven three-dimensionally.
申请公布号 JPS52113167(A) 申请公布日期 1977.09.22
申请号 JP19760029198 申请日期 1976.03.19
申请人 NIPPON TELEGRAPH & TELEPHONE 发明人 HAYASAKA TOUA;NAKAYAMA SATORU;SAITOU YASUNAO;YAMAZAKI SHINICHI
分类号 H01L21/027;H01L21/302 主分类号 H01L21/027
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