Device for producing coatings by means of ion sputtering

摘要

A device intended for producing single-layer coatings or films, for example, artificial diamond coatings or films, as well as multilayer or sandwich coatings. The device comprises a plurality of vacuum discharge chambers and at least two pairs of cathodes arranged in each of the chambers. Each pair of cathodes is provided with an anode which is disposed equidistantly from the cathodes forming each respective pair, the anodes of all the pairs of cathodes being arranged in one plane, whereas the cathodes in all the pairs are arranged in two planes that are parallel to the plane in which the anodes are arranged. Articles to be coated are arranged at the point of convergence of atomic beams of the cathode substance being sputtered. Each chamber is provided with a magnetic field source of its own. There is a vacuum evacuation system for all the chambers.