发明名称 |
Humidity sensor, material therefor and method |
摘要 |
A novel humidity sensor printed and fired on a dielectric substrate comprising an interdigitated pattern of a conductive precious metal with cobalt oxide as the only binder. Sensors according to the invention may be employed as hermeticity detectors in semiconductor packages.
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申请公布号 |
US4050048(A) |
申请公布日期 |
1977.09.20 |
申请号 |
US19760747246 |
申请日期 |
1976.12.02 |
申请人 |
PLESSEY INCORPORATED |
发明人 |
FRAZEE, LAWRENCE E. |
分类号 |
G01N27/12;(IPC1-7):H01L7/00 |
主分类号 |
G01N27/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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