发明名称 Scratch-resistant mask for photolithographic processing
摘要 Disclosed is a photomask and a method for the manufacture thereof. A metal stencil is disposed on a glass substrate such that only preselected areas of the glass which are to be made opaque are exposed. A grit-etch step follows in which depressions are formed in the glass substrate in the preselected areas. Fusible masking material is sprayed in the depressions through the metal stencil. The masking material is preferably in particulate form in a volatile carrier liquid. The carrier liquid is preferably first driven off and, then, the combination is exposed to a relatively high temperature that fuses the masking material to the substrate.
申请公布号 US4049347(A) 申请公布日期 1977.09.20
申请号 US19760669720 申请日期 1976.03.24
申请人 GENERAL ELECTRIC COMPANY 发明人 SMITH, JR., CARLYLE F.
分类号 G03F1/00;G03F1/08;H01L21/027;(IPC1-7):G03B27/28 主分类号 G03F1/00
代理机构 代理人
主权项
地址