发明名称 Method for fabricating a self-aligned metal oxide field effect transistor
摘要 An improved and simplified method of fabricating field effect transistors in metal oxide semiconductor integrated circuits advantageously employs the differential growth rate, under certain temperature conditions, between oxide on silicon wherein phosphorous has been diffused, and on silicon without such diffusion. The improved method of fabrication reduces the number of fabrication steps required, while simultaneously producing field effect transistors with superior operation speeds.
申请公布号 US4049477(A) 申请公布日期 1977.09.20
申请号 US19760663170 申请日期 1976.03.02
申请人 HEWLETT-PACKARD COMPANY 发明人 LIGON, THOMAS R.
分类号 H01L29/78;H01L21/22;H01L21/283;H01L21/316;H01L21/336;(IPC1-7):H01L21/22 主分类号 H01L29/78
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