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发明名称
EXHAUST FOR ELECTRON MICROSCOPE OF THE LIKE
摘要
申请公布号
JPS52109364(A)
申请公布日期
1977.09.13
申请号
JP19760025103
申请日期
1976.03.10
申请人
HITACHI LTD
发明人
SATOU HISASHI;KUBOZOE MORIKI
分类号
H01J37/18;H01J37/26
主分类号
H01J37/18
代理机构
代理人
主权项
地址
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