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发明名称
ELECTROMAGNETICALLY ACTUATED THREE STAGE OPERATIONAL VACUUM DRIVING APPARATUS
摘要
申请公布号
JPS52109084(A)
申请公布日期
1977.09.12
申请号
JP19760024195
申请日期
1976.03.08
申请人
TOHO GASU KOUGIYOU KK
发明人
ISHIKAWA MASAHIDE
分类号
F16K31/40;F15B15/10;F15B15/24
主分类号
F16K31/40
代理机构
代理人
主权项
地址
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