| 发明名称 |
PRODUCTION OF SR2NB207 SINGLE CRYSTAL THIN FILM |
| 摘要 |
PURPOSE:To produce a light pass of a single crystal thin film with low transmission loss by using Sr2 Ta2 O7 single crystal as a substrate, specifying partial pressure of O2 in sputtering atmospheric gas, and using a sintered product of formula (SrO)2(Nb2O5)y as a target. |
| 申请公布号 |
JPS52108400(A) |
申请公布日期 |
1977.09.10 |
| 申请号 |
JP19760025202 |
申请日期 |
1976.03.09 |
| 申请人 |
NIPPON ELECTRIC CO |
发明人 |
ISHITANI AKIHIKO;KIMURA MASAKAZU;MATSUBARA TETSUTO |
| 分类号 |
C01G33/00;C30B23/08;C30B29/30;G02F1/03;G02F1/05 |
主分类号 |
C01G33/00 |
| 代理机构 |
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