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经营范围
发明名称
MULTITARGET SEQUENTIAL SPUTTERING APPARATUS
摘要
申请公布号
GB1485331(A)
申请公布日期
1977.09.08
申请号
GB19750015575
申请日期
1975.04.16
申请人
NASA
发明人
分类号
C23C14/34;(IPC1-7):C23C15/00
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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