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发明名称
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS52106675(A)
申请公布日期
1977.09.07
申请号
JP19760023132
申请日期
1976.03.05
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
NAKASE MAKOTO;HORIUCHI SHIGEHARU
分类号
H01L21/3205;H01L21/28
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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