发明名称 LIQUIDDPHASE EPITAXIAL GROWTH METHOD
摘要 PURPOSE:The semiconductor crystal substrate is put into melt, and only melt is taken out after saturating with soluble atom to be touched substrate crystal. As a result, multi-layer growth layer of III-V chemical compound can be obtained with no oxidation film on the surface.
申请公布号 JPS52106271(A) 申请公布日期 1977.09.06
申请号 JP19760022225 申请日期 1976.03.03
申请人 OKI ELECTRIC IND CO LTD 发明人 ICHIKAWA FUMIO
分类号 C30B19/00;H01L21/208;H01L33/30 主分类号 C30B19/00
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