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发明名称
VERFAHREN ZUR HERSTELLUNG EINER MONOLITHISCH INTEGRIERTEN HALBLEITERSCHALTUNG MIT EINEM JUNCTION-FELDEFFEKTTRANSISTOR UND EINEM KOMPLEMENTAEREN MIS-FELDEFFEKTTRANSISTOR
摘要
申请公布号
DE2537559(B2)
申请公布日期
1977.09.01
申请号
DE19752537559
申请日期
1975.08.22
申请人
发明人
分类号
H01L27/092;H01L21/265;H01L21/266;H01L21/8238;H01L27/085;H01L29/78;(IPC1-7):H01L21/72
主分类号
H01L27/092
代理机构
代理人
主权项
地址
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