| 发明名称 |
PRODUCTION OF SURFACE PROTECTION FILM OF ELECTRONIC PARTS |
| 摘要 |
PURPOSE:To produce a surface protection film with high reliability which excells in wet proof and anti corosive character, by means of forming Si3N4 film with plasma CVD, through a silicate glass film on the surface of Al distribution layer. |
| 申请公布号 |
JPS52104062(A) |
申请公布日期 |
1977.09.01 |
| 申请号 |
JP19760019989 |
申请日期 |
1976.02.27 |
| 申请人 |
HITACHI LTD |
发明人 |
YOSHIMI TAKEO;SAKAI HIDEO |
| 分类号 |
H01L29/78;H01L21/31;H01L21/318;H01L21/768;H01L23/522 |
主分类号 |
H01L29/78 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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