| 发明名称 |
REFERENCE PLANE FORMATION TOOL FOR NON CONTACT TYPE PHOTO SENSITIVE MA CHINERY |
| 摘要 |
PURPOSE:To produce a reference plane formation tool in order to devide a micro gap between a mask and photosensitive material by means of lowering the height lower than the ring shape projection by a specified length by installing three snall projection inside the ring shape projection. |
| 申请公布号 |
JPS52104065(A) |
申请公布日期 |
1977.09.01 |
| 申请号 |
JP19760019974 |
申请日期 |
1976.02.27 |
| 申请人 |
HITACHI LTD |
发明人 |
YAMAGUCHI HISAO;KAMEYAMA KATSUNORI |
| 分类号 |
H01L21/027;H01L21/302;H01L21/48 |
主分类号 |
H01L21/027 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
