| 发明名称 |
LOW LEAKAGE VACUUM VALVE AND CHAMBER USING SAME |
| 摘要 |
<p>A low-leakage vacuum valve provides direct access to the interior of an evacuated chamber when opened while maintaining a substantial pressure differential when closed. A simplified vacuum chamber uses the valve to advantage in processing materials.</p> |
| 申请公布号 |
CA1016560(A) |
申请公布日期 |
1977.08.30 |
| 申请号 |
CA19740193045 |
申请日期 |
1974.02.20 |
| 申请人 |
BROOKS, NORMAN B. |
发明人 |
BROOKS, NORMAN B. |
| 分类号 |
H01J37/317;B01J3/02;C23C14/56;C30B25/14;F16K5/04;F16K51/02;H01J37/18;H01L21/677;H05H5/02 |
主分类号 |
H01J37/317 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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