METHOD OF MONITORING ELECTRIC CHARACTERISTICS OF LARGE CURRENT DENSITY GLOW DISCHARGE AND APPARATUS THEREFOR,申请号JP19770017063-传众专利搜索

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发明名称	METHOD OF MONITORING ELECTRIC CHARACTERISTICS OF LARGE CURRENT DENSITY GLOW DISCHARGE AND APPARATUS THEREFOR
摘要
申请公布号	JPS5299935(A)	申请公布日期	1977.08.22
申请号	JP19770017063	申请日期	1977.02.18
申请人	NIPPON IONON KK	发明人	BERUNAA OPERU
分类号	C23C8/36;H01J37/32;H02H1/00;H02H3/10;H02H7/00;H05B7/16	主分类号	C23C8/36
代理机构		代理人
主权项
地址

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