REACTEUR A FLUX RADIAL POUR FORMATION DE REVETEMENTS,申请号FR19770001184-传众专利搜索

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发明名称	REACTEUR A FLUX RADIAL POUR FORMATION DE REVETEMENTS
摘要
申请公布号	FR2339001(A1)	申请公布日期	1977.08.19
申请号	FR19770001184	申请日期	1977.01.17
申请人	WESTERN ELECTRIC CY INC	发明人
分类号	H01L21/205;C23C16/509;H01L21/302;H01L21/3065;H01L21/31;(IPC1-7):C23C13/08	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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