DISPLAY DEVICE AND PRODUCTION THEREOF

摘要

PURPOSE:To lessen the peeling of a picture element electrode by providing a transparent insulating film in a transparent substrate and a gate electrode to uniform film quality on the transparent conductive film formed thereon. CONSTITUTION:The gate electrode 12' is formed from a metallic film 12 ion the transparent substrate 11 and the insulating film 13 consisting of SiO2 is formed by a plasma CVD method thereon. The picture element electrode 14' is formed form the transparent conductive film 14 and a gate insulating film layer 15' and an active layer 16' are laminated and formed thereon. Further, a drain electrode 17' a and a source electrode 17'b are formed and finally a protective film consisting of SiO2 and SiNx for protecting the surface are formed. The insulating film 13 is provided on the transparent substrate 11 and the gate electrode 12' in such a manner, by which the transparent conductive film 14 having the uniform film quality is obtd. and the peeling of the picture element electrode 14' is lessened.