| 发明名称 |
COLD GRAP PROVIDED WITH GETTER EFFECT |
| 摘要 |
PURPOSE:To increase the adsorption efficiency of residual gas by providing a getter mechanism in the space enclosed by a cooling trap for adsorption and specimen. |
| 申请公布号 |
JPS5297787(A) |
申请公布日期 |
1977.08.16 |
| 申请号 |
JP19760014055 |
申请日期 |
1976.02.13 |
| 申请人 |
HITACHI LTD |
发明人 |
SHIBATA ATSUSHI |
| 分类号 |
H01J37/20;G01N23/22;G01N23/225 |
主分类号 |
H01J37/20 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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