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发明名称
DATA TRANSFER
摘要
申请公布号
JPS5295965(A)
申请公布日期
1977.08.12
申请号
JP19760012266
申请日期
1976.02.09
申请人
HITACHI LTD
发明人
MAKINO KEISUKE;NAKAMURA SOUICHIROU;YAMAZAKI KAZUO
分类号
H01L21/66;H01L21/301;H01L21/48
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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