发明名称 |
MASK FITTING DEVICE OF SEMICONDUCTOR SUBSTRATE |
摘要 |
PURPOSE:To prevent contamination of substrate by providing a hole for adsorbing the substrate and a hole for detaching on the substrate mount and connecting the hole for adsorbing to a pressure reducing source through a filter directly attached to the mount and connecting the hole for adsorbing to a high pressure source. |
申请公布号 |
JPS5295979(A) |
申请公布日期 |
1977.08.12 |
申请号 |
JP19760012674 |
申请日期 |
1976.02.07 |
申请人 |
TOKYO SHIBAURA ELECTRIC CO |
发明人 |
OIDA TAKAMI;SEKI HIDENORI;SHIMAZAKI KUNIYA |
分类号 |
H01L21/027;H01L21/302 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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