| 发明名称 |
DIVIDING AND CLEANSING FOR SEMIICONDUCTOR PELLET |
| 摘要 |
<p>PURPOSE:To facilitate secure and automated cleansing by dividing wafers adhered on a sustaining base through the intermediary of a wax layer into pellets, heating them to exfoliate, and sustaining them in orderly fashion.</p> |
| 申请公布号 |
JPS5295164(A) |
申请公布日期 |
1977.08.10 |
| 申请号 |
JP19760011452 |
申请日期 |
1976.02.06 |
| 申请人 |
HITACHI LTD |
发明人 |
TAKAHASHI YUKIO;OKAMURA SHIMUYA |
| 分类号 |
H01L21/301;H01L21/30;H01L21/304;H01L21/78 |
主分类号 |
H01L21/301 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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