| 发明名称 |
EVAPORATOR BY ELECTRON BEAM |
| 摘要 |
PURPOSE:To prevent the degradation of element property caused by secondary electron by inserting a grounded or low voltage wire net between electron beam system and materials to be evaporated. |
| 申请公布号 |
JPS5295170(A) |
申请公布日期 |
1977.08.10 |
| 申请号 |
JP19760011453 |
申请日期 |
1976.02.06 |
| 申请人 |
HITACHI LTD |
发明人 |
TOMOSAWA AKIHIRO;NAKADA KENSUKE;YOSHIDA HIROBUMI |
| 分类号 |
C23C14/30;H01L21/285 |
主分类号 |
C23C14/30 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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