发明名称 |
Etchants for glass films on metal substrates |
摘要 |
An aqueous solution for etching a glass layer on a metal (aluminum) substrate without substantial attack on the metal. The solution comprises buffered hydrofluoric acid, sodium chloride, and either (a) a fluorocarbon surfactant capable of forming a protective thin film upon the aluminum, or (b) a 6-hydroxy alcohol (e.g., mannitol or sorbitol).
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申请公布号 |
US4040897(A) |
申请公布日期 |
1977.08.09 |
申请号 |
US19760740546 |
申请日期 |
1976.11.10 |
申请人 |
SIGNETICS CORPORATION |
发明人 |
BLISH, II, RICHARD C.;LEMONS, KYLE EUGENE |
分类号 |
C03C15/00;H01L21/311;(IPC1-7):H01L21/31 |
主分类号 |
C03C15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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