| 发明名称 |
THERMAL TREATMENT EQUIPMENT |
| 摘要 |
PURPOSE:To obtain a thermal treatment equipment for preventing the uneven thermal treatment and possible to effect the continuous treatment. |
| 申请公布号 |
JPS5294076(A) |
申请公布日期 |
1977.08.08 |
| 申请号 |
JP19760010332 |
申请日期 |
1976.02.04 |
| 申请人 |
HITACHI LTD |
发明人 |
NAGATOMO HIROTO;TAKAGAKI TETSUYA;OKUDA RIYOUICHI |
| 分类号 |
C30B33/00;C23C16/54;C30B33/02;H01L21/205;H01L21/22 |
主分类号 |
C30B33/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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