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发明名称
摘要
申请公布号
JPS5230237(B2)
申请公布日期
1977.08.06
申请号
JP19730012348
申请日期
1973.01.30
申请人
发明人
分类号
H01L41/107;H01L41/08;H02M3/24
主分类号
H01L41/107
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代理人
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