发明名称 MANUFACTURE FOR SEMICONDUCTOR DEVICE
摘要 PURPOSE:To obtain semiconductor which has no increase in a leak current and no voltage drop by H2O penetrating into the semiconductor, by ion-plating by the use of a desorptionable metal mask.
申请公布号 JPS5293270(A) 申请公布日期 1977.08.05
申请号 JP19760009318 申请日期 1976.02.02
申请人 HITACHI LTD 发明人 FUYAMA TAKAAKI;ASAI OSAMU
分类号 H01L29/872;H01L21/265;H01L29/47 主分类号 H01L29/872
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