发明名称 PROCEDE DE FABRICATION DE MICRO-MOTIFS ET MICRO-SUBSTRATS APPROPRIES
摘要 <p>Articles exhibiting a micropattern carried by a surface of a support, typically microdevices comprising a micropattern of a functional material on or in a substrate of a dissimilar material, are produced by a method employing a microsubstrate comprising a substrate base, a protein layer which comprises at least a compressed monolayer of a denatured non-fibrous protein on the base, and a masking film overlying the protein layer, the material of the masking film being such as to be modified by radiant energy so as to be removable from the protein layer where irradiated. The method is flexible in the sense that it is possible to proceed via either a positive or a negative of the desired micropattern and to build a more extensive, or more complex, micropattern from an initial relatively simple micropattern.</p>
申请公布号 FR2337893(A1) 申请公布日期 1977.08.05
申请号 FR19770000177 申请日期 1977.01.05
申请人 DIOS INC 发明人
分类号 H01L51/05;B05D5/00;B32B9/02;G03C1/93;G03F7/038;G03F7/039;G03F7/11;G06N3/00;H01L21/027;H01L21/312;H01L21/368;H01L51/30;H01L51/40;H05K3/14;(IPC1-7):03F1/00;03C1/72;01L21/84;01L21/312 主分类号 H01L51/05
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